The Hitachi SU8010 Scanning Electron Microscope (SEM) has a cold field emission (CFE) source for excellent imaging performance in a wide variety of demanding applications in materials research.
The operating voltage range is 100V to 30kV.
Applying Hitachi's beam deceleration technology for insulating samples, a resolution of 1.3 nm can be achieved at a landing voltage of 1 kV.
The effective use of this mode offers superior image quality even down to the lowest beam energy of 100 eV.
- Accelerating Voltage : 500 V
- Magnification : 100kx
- Landing Voltage : 500 V
- Magnification : 100kx
Principle of Beam Deceleration
Beam Deceleration On
